Investigation Of Sb-Rich Sb-Te Binary Films Used As Phase Change Material

Sb-rich Sb-Te films with different composition were investigated by temperature-dependent resistance measurement, crystal structure characterization, and in situ crystallization behavior study. The results show that when the Sb content is more than 80 at.%, Sb-rich Sb-Te films cannot be used as phase change material due to their low crystallization temperature and small resistance contrast. Sb-rich Sb-Te films with the Sb content being between 80 similar to 67 at.% can be used as phase-change-material and they have similar properties because of their similar growth-dominant crystallization behaviors.