Growth and characteristics of diamond-like carbon (DLC) films deposited by direct negative carbon ion beam deposition

Daeil Kim,H.S. Jang,Y.S. Kim,D.H. Choi,B.K. Choi,J.H. Lee,Y.Z. You,H.G. Chun

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms（2007）

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摘要

Diamond-like carbon films were deposited on Si substrate using direct negative carbon ion (C−) beam source at various C− ion beam energy and then the effect of ion beam energy on the crystal structure, sp3/sp2 ratio, hardness and surface roughness of DLC film was investigated. As ion beam energy increased from 25 to 150eV, the sp3/sp2 ratio of DLC films increased from 32% to 67%.

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41.75.Cn,62.20.Qp,68.37.Ps

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