X-Ray Studies Of Ti-N Coatings

Detailed studies of Ti-N coatings deposited either by hollow cathode evaporation or by ion sputtering onto high speed steel have been performed. Phase identification, texture and profile analysis were carried out from X-ray diffraction data. A series of stable and unstable phases were found. The (111) texture was dominant in all cases. Dislocation density and configuration were determined by X-ray profile analysis to give an estimate of coating hardness.