Bidimensional X-ray Diffraction Analysis for Structural and Microstructural Characterization of Lanthanum Manganite Thin Films

Sodium-doped lanthanum manganite thin films were deposited by Rf-magnetron sputtering onto Si(100) single-crystal substrates. Structural and microstructural properties of both as-deposited and annealed samples were investigated by means of X-ray bidimensional microdiffraction. Two distinct preferred orientations have been detected as a result of the formation of two layers during the growth process. A new method (Debye ring analysis for stress measurement, DRAST), based on the analysis of Debye ring distortion, allowed the strain associated with the preferentially oriented domains to be evaluated.