Anti-IR Films of Resin Lens Prepared by Pulse Magnetron Sputtering

Laser & Optoelectronics Progress(2011)

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摘要
SiO_2 and Si_3N_4 are chosen as coating materials.The structure of thin films is optimized by using software.Mid-frequency pulse magnetron sputtering is adopted to prepare the films.Deposition rate is calibrated by fitting the measured transmittivity curve of high-reflective thin films,which improves the precision of film thickness monitoring.The anti-IR films and visible light anti-reflective films are successfully deposited on the convex and concave suface of CR39 resin lens respectively.At normal incidence angle,the average transmittivity of the resin lens after coating is more than 95% at 420~680 nm,and is less than 60% at 800~1350 nm,which meets the infrared protective resin lenses need for daily use.
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关键词
thin films,anti-ir films,mid-frequency pulse magnetron sputtering,resin lens
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