Fabrication Of Magnetic Layers For Electromagnetic Microactuators

For designing and fabricating magnetic microactuators, both soh and hard magnetic materials may be required. For soft magnetic materials, a. high saturation flux density B-s and a great relative permeability mu(r) is desirable; for forming efficient permanent magnets, hard magnetic materials require a high maximal energy product vertical bar BH vertical bar(max) In the area of soft magnetic materials, investigations on NiFe81/19, NiFe45/55, and CoFe were carried out, while an example for a hard magnetic material providing a high energy product is SmCo. Since patterned thin-film magnets feature inferior magnetic properties compared to bulk magnets, a method of determining their magnetic properties was developed.