Summary For the construction of the silicon microstrip detectors for the Tracker of the CMS experiment, two different substrate choices were investigated: A high-resistivity (6 k cm) substrate with (111) crystalorientation and a low-resistivity (2k cm) one with (100) crystalorientation. The interstrip and backplane capacitances were measured before and after the exposure to radiation in a range of strip pitches from 60 μm to 240 μm and for values of the width-over-pitch ratio between 0.1 and 0.5.
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Tracking and position-sensitive detectors,Solid-state detectors,Semiconductors,Conference proceedings