Effect of surface treatment on electrical properties of AlGaAs/GaAs heterojunction bipolar transistor

This paper presents the effect of surface treatment on the electrical properties of an AlGaAs/GaAs heterojunction bipolar transistor (HBT). The extrinsic base surface of the HBT was treated in sequence with a (NH4)2Sx:H2O=1:1 solution, H2 plasma, and NH3 plasma. The treated HBT had a lower surface recombination current, base resistance, and low-frequency base current noise than the untreated HBT. These values decreased by 32%, 42%, and ∼3dB, respectively. Because of the reduced base resistance, the maximum frequency of oscillation fmax, which was 40.3GHz without surface treatment, improved to 57.8GHz.