Makyoh-Imaging zur Charakterisierung reflektierender Oberflächen Surface Structure Analysis by Makyoh-Imaging

In process and quality control is a strong demand for the recognition and classification of surface structures and defects. Makyoh imaging ("Ma-Kyoh", Japanese for magic mirror) is a highly sensitive optical characterization tool for large-area analysis. Under collimated illumination, local convex and concave structures affect the intensity of the reflected beam. Based on a realized Makyoh set-up at the Fraunhofer IOF it is shown that it is possible to obtain fast qualitative and quantitative conclusions on surface structure and defects from the reflected beam. Results of analyzed structures on wafers and polished glass surfaces are presented.