Study of Stress and Morphology of Superconducting Niobium Thin Films
IEEE Transactions on Applied Superconductivity(2009)
摘要
Intrinsic stress, surface morphology and crystallographic structure of superconducting thin films play an important role in determining the quality of their superconducting properties and the Josephson junctions made of them. Nb thin films deposited by DC magnetron sputtering with various deposition conditions were studied using curvature method, atomic force microscopy and X-ray diffraction. The ...
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关键词
Stress,Morphology,Niobium,Superconducting thin films,Superconducting transition temperature,Sputtering,Josephson junctions,Crystallography,Atomic force microscopy,Substrates
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