Kombinierter Einsatz von Scherografie und Thermografie zur Charakterisierung thermo-mechanischer Beanspruchung (Combined Shearography and Thermography Measurements of Thermo-mechanical Deformations)

Thermo-mechanically induced deformations and stresses, especially shear stress, are key issues concerning fatigue and failure of microsystems. We report on the development of a combined set-up for measuring temperature by a thermographic camera as well as deformation gradients by 3D-shearography. The 3D-shearographic camera based on a multi-wavelength set-up is adapted to the microscope optics of a thermographic camera in order to view the same area of interest and the same state of operation of the sample under test. The measurement system works for quasi-stationary states and can be used for characterisation of test samples under real operating conditions without being restricted to destructive sample preparation. We present preliminary results of temperature distribution and thermo-mechanical deformation gradients.