Effects of substrate temperature and texturing on the magnetic properties and crystallographic structures of CoCrTa/Cr thin film

Bi-layer CoCrTa/Cr films were deposited on textured aluminium or textured NiP-plated aluminium substrate by d.c. magnetron sputtering. The crystal anisotropy and thereby magnetic properties depending on substrate material, substrate temperature and texturing, were investigated. The magnetic crystal anisotropy induced by the mechanical texture on aluminium or NiP/Al substrates along the texture lines for the film deposited at high temperature, were clearly observed, while the film deposited at low temperature shows less prominent anisotropic behaviour. X-ray diffraction analysis indicates a change in the preferred orientation of the chromium and CoCrTa films sputtered on different substrates at different temperatures. It was found that a high substrate temperature was beneficial to the formation of Cr(002) and therefore epitaxial growth of Co(11¯20) on Cr(002) for either aluminium or NiP/Al substrates.