37.3: Low Cost Manufacturing of Patterned Films with Nano-Precision

Zhilian Zhou,Ginger Rothrock,Doug Mar,Xiansheng Meng,Jennie Orr,Robert Henn

SID INTERNATIONAL SYMPOSIUM DIGEST OF TECHNICAL PAPERS（2008）

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摘要

Much attention has been given to methodologies for patterning optical films with nanoscale precision at the scale and economics required by the Flat Panel Display industry. By using a proprietary mold material, the PRINT(TM) (Pattern Replication In Nonwetting Template) technology enables low cost manufacturing of precise micro and nanoscale features with single nanometer precision from virtually any material.

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