An Iterative Computer-Analysis Package For Elastic Recoil Detection (Erd) Experiments

A computer program for routinely calculating the depth profiles of elements in the surface layers of solids from experimental elastic recoil detection (ERD) spectra is described. The program, which is capable of handling a large number of multielement layers, rapidly converges to yield accurate atomic concentration ratios without any a priori assumptions about the composition of an unknown target. The analysis package contains a menu-driven database which facilitates the manipulation and storage of data. It meets the analysis needs of thin-film material sciences, such as microelectronics, where consistent, accurate and fast turnaround of data from a large number of samples is demanded. The output contains a summary of the average concentrations, the widths (in μg/cm 2 ) of each layer, the mass and energy spectra, the individual element depth profile plots as well as a composite depth profile plot of all the elements under consideration.