Automated Two-Axes Optical Fiber Alignment Using Grayscale Technology

In this paper, we report a new method for actuating an optical fiber in two axes. This device enables in package active alignment of an optical fiber towards reducing the time and cost of optoelectronic packaging by eliminating the need for expensive and slow macroalignment machines. Opposing comb-drive actuators with integrated three-dimensional (3-D) wedges (fabricated using grayscale technology...