Fabrication and characterization of GeO2-PbO optical waveguides

V D D Cacho,L R P Unesp Kassab,A D Dos Santos,A L Siarkowski,D M Da Silva,N I Morimoto

symposium on microelectronics technology and devices（2009）

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摘要

Departamento de Engenharia de Sistemas Eletronicos Escola Politecnica Universidade de Sao Paulo, Sao Paulo, SP

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关键词

room temperature,scanning electron microscopy,chemical elements,thin films,microelectronics,silicon wafers,waveguides,simulation software,rf power,sem

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