Microtexture and hardness of CVD deposited α-Al2O3 and TiCxN1−x coatings

International Journal of Refractory Metals and Hard Materials(2009)

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摘要
The microstructures of chemical vapor deposited coatings on four tool inserts have been comprehensively characterized using electron backscatter diffraction mapping. Nanoindentation was used to measure the hardness of the TiCxN1−x and α-Al2O3 layers in each coating. The TiCxN1−x layers have weak [112] or [101] textures in the growth direction and are highly twinned. In these layers, coherent twins make up 13%–20% of the total grain boundary length. The alumina layers have [101¯4] or [0001] textures in the growth direction that are 4.2–8.8 times random. The hardest coatings consist of highly twinned TiCxN1−x layers with weak [112] texture and α-Al2O3 with strong [101¯4] texture.
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关键词
Coatings,Microstructure,Texture,Hardness
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