Feasibility Study of a Novel Technique for Measurement of Liquid Thermal Conductivity with a Micro-beam Sensor

A new method was proposed to measure the thermal conductivity of liquids with infinitesimal samples, which are much smaller than those required in conventional methods. The method utilizes a micro-beam-type MEMS sensor fabricated across a trench on a silicon substrate. Numerical analysis of heat conduction within and around a uniformly heated sensor showed that the temperature of a 10 μm long sensor reached a steady state within approximately 0.1ms, after the start of heating. It was also revealed that the average temperature of the sensor at the steady state was higher in liquids with lower thermal conductivity. These results demonstrate a new idea of measuring the thermal conductivity of liquids within an extremely short time at a steady state before the onset of natural convection.