A self-consistent one-dimensional modeling and simulation of solenoidal inductively coupled plasma discharge

We present a self-consistent model of solenoidal inductively coupled plasma ( ICP) discharge, which can be useful to understand the discharge physics of the ICP. This model includes one-dimensional heating model and particle and temperature transport models. The heating model is based on the kinetic response of the plasma to the exciting RF wave including anomalous skin effect and modulation effect by chamber walls, which is the dominant mechanism at low pressure. The particle and temperature transports are expressed by one-dimensional fluid equations (continuity equation, momentum equation, and temperature equation). The argon discharges are simulated and the various results, such as the radial profiles of plasma density, electron temperature, induced electric field, and local power absorption are presented. (C) 1999 Elsevier Science S.A. All rights reserved.