Three-dimensional secondary ion mass spectrometry analysis of surface-modified materials and the application to 13C-implanted steels

Secondary ion mass spectrometry image depth profiling with Cs + ion sputtering has been used to examine two 13 C-implanted steel samples (NBS SRM-466 and AISI W-1) containing 0.065% and 0.9% natural carbon respectively. The samples were examined before and after 13 C + implantation of 2×10 17 ions cm −2 at 100 kV. In the implants, five elements, 12 C, 13 C, oxygen, sulfur and iron, all produce different ion image patterns. The 13 C signal is uniformly distributed in the lateral directions through the peak of the implant. Deeper into the sample the 13 C signal is segregated into a distinct pattern.