Stitching Interferometry : Recent results and Absolute calibration

Proceedings of SPIE(2004)

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摘要
Stitching Interferometry is a method of analysing large optical components using a standard "small" interferometer. This result is obtained by taking multiple overlapping images of the large component, and numerically "stitching" these sub-apertures together. We have already reported the industrial use our Stitching Interferometry systems (Previous SPIE symposia), but experimental results had been lacking because this technique is still new, and users needed to get accustomed to it before producing reliable measurements. We now have more results. We show new, unpublished, measurements, including repeatability measurements. We will discuss sources of error, and show how some of these can be reduced to arbitrarily small values. We present simulation results for the 1-Dimension case of this "Multi-scale reconstruction" method. We conclude with a few pictures of recent measurements, performed by our customers.
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关键词
stitching interferometry,interferometry,optical metrology,absolute surface shape metrology
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