Formation Of Cuins2-Carbon Multilayers In The Spray Ilgar Process

Christian Camus,Daniel Abou-Ras,Nicholas A. Allsop,Sophie E. Gledhill,Tristan Koehler, Joerg Rappich,Iver Lauermann,Martha C. Lux-Steiner, Christian-Herbert Fischer

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE（2010）

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摘要

In this paper the incorporation of carbon into CuIns(2) (CIS) thin films is described as observed in spray ion layer gas reaction (ILGAR) deposition of such thin films. It is shown that this carbon incorporation leads to the formation of a CIS-carbon multilayer stack. Its growth mechanism is explained by the interaction of the copper and indium precursor compounds used in the deposition process.

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