Regulation of oxygen vacancies in Nitrogen-doped Ga2O3 films for high-performance MSM solar-blind UVphotodetectors

Jinjin Wang,Xueqiang Ji,Song Qi,Zhitong Li,Zuyong Yan,Mengcheng Li, Xu Yan,Aoxue Zhong,Chao Lu,Xiaohui Qi,Peigang Li

Journal of Materials Chemistry C（2023）

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摘要

Gallium oxide (Ga2O3)-based solar-blind photodetectors (SBPDs) have shown promising applications. However, the concentration of native oxygen vacancy (VO) impacts the photoelectrical performance of the Ga2O3 film. Herein, a nitrogen-doping method...

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