Effects of post annealing on micro and nanostructural properties of ZrN films prepared by ion beam sputtering technique on SS304

M.M. Larijani,Sh. Norouzian,R. Afzalzadeh,P. Balashabadi,H. Dibaji

Surface and Coatings Technology（2009）

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摘要

Zirconium nitride Films are deposited by ion beam sputtering method on AISI 304 stainless steel substrates with different nitrogen flow rates and are subsequently annealed at 700° C.

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关键词

Zirconium nitride,Post annealing,RBS,XRD,Microhardness

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