Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers
Journal of Electronic Materials（2008）
Key words
Fabry–Pérot resonators,microelectromechanical devices,infrared image sensors,infrared detectors,photoconducting materials,infrared spectroscopy
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined