Nanometer-Scale Depth Resolution and Sensitive Surface Analysis Using Laser Ablation Atomic Fluorescence Spectroscopy

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS(2006)

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摘要
An extremely high-resolution, nanometer-resolution, solid-surface trace element detection has been demonstrated. Nanometer-thinned pulsed laser ablation was combined with extremely sensitive laser-induced fluorescence spectroscopy, and depth resolution of 3.6 nm was experimentally demonstrated for the first time on sodium detection in polymeric samples. An extremely high absolute detection limit of 25.2 fg was also obtained, and a theoretical calculation program was also generated to analyze the results.
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关键词
surface analysis,laser spectroscopy,nanometer,trace element,laser ablation
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