Micro Solid Oxide Fuel Cell In Silicon Technology With Reinforced Electrolyte Membrane

Solid oxide electrolyte membranes of sputter deposited yttria-stablized zirconia (YSZ) were integrated in silicon technology for applications in micro power generators fuelled by hydrogen or H-2+CO. An electrochemically deposited nickel grid was used as mechanical support for the 200-300 nm thick membrane. Cells with 0.5 to 5 mm diameter were fabricated showing mechanical stability up to 650 degrees C. The ionic conduction becomes sufficient to produce open circuit voltage (OCV) above 380 degrees C. An OCV of 850 mV was achieved at 550 degrees C in an H-2/Ar fuel mixture using porous Pt electrodes.