Modelization of epitaxial GaAs X-ray detectors

Solar Energy Materials and Solar Cells(2006)

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摘要
X-ray detectors are fabricated with non-intentionally doped thick epitaxial GaAs layers grown by a chemical technique. They are p+/i/n+ structures in which the highly doped p- and n-type layers are made by ion implantation on both faces of the i epilayers. In order to understand the behaviour of charge collection, we modelize the capacitance–voltage characteristics of such structures, which are then compared with experimental data.
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关键词
X-ray detectors,GaAs,Epitaxy,Space charge region
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