Can Proximity X-Ray Lithography Print 35 Nm Features? YesM Khan,G Han,G Tsvid,T Kitayama,J Maldonado,F CerrinaJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B(2001)引用 29|浏览12AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要