Surface treatment of pure and alloyed aluminum using a new plasma-based ion implanter apparatus

The characterization of an upgraded and flexible plasma-based ion implanter has been initiated; in terms of dose rate,uniformity, and control of the implant profile. In this article,,we report the preliminary results of a comparative study of different means of hardening aluminium and reducing its friction coefficient, with an emphasis on microcharacterization [Auger electron spectroscopy (AES) and Rutherford backscattering spectroscopy depth profiling, x-ray photoelectron spectroscopy (XPS), and scanning force microscopy (SFM)]. In particular we present an AES study of the N and O depth profiles produced in Al by our system; an XPS characterization of the stoichiometry and bond chemistry of ion nitrided Al; and a SFM study of the respective roles of roughness and atomic forces in friction on the N-implanted samples. (C) 1999 American Vacuum Society. [S0734-211X(99)02902-9].