Reactions of substituted aromatic hydrocarbons with the Si(001) surface

The interactions of toluene, para-xylene, meta-xylene and ortho-xylene with the (001) surface of silicon have been investigated using Fourier-transform infrared spectroscopy. Infrared spectra show that these methyl-substituted aromatic hydrocarbons are chemisorbed and oriented on the Si(001) surface at both 110 and 300 K. Peaks in the Si-H stretching region indicate that some dissociation occurs upon adsorption. Comparisons of infrared spectra of these molecules with deuterated and nondeuterated methyl groups reveal that the major source of decomposition is likely from C-H cleavage of the substituent groups, leaving the ring intact. Additionally, the striking similarity of the infrared spectra of benzene, toluene and the xylene isomers suggests that the methyl-substituted aromatic rings interact with the Si(001) surface in much the same way as benzene. Differences in relative peak intensity point to the possibility that the methyl substituent groups may steer the ring into different ratios of specific bonding geometries. (C) 2000 American Vacuum Society. [S0734-2101(00)10404-X].