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The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD

V. Verlaan,A.D. Verkerk,W.M. Arnoldbik,C.H.M. van der Werf,R. Bakker,Z.S. Houweling,I.G. Romijn,D.M. Borsa,A.W. Weeber,S.L. Luxembourg,M. Zeman,H.F.W. Dekkers,R.E.I. Schropp

Thin Solid Films（2009）

Cited 40|Views10
Key words
Hot Wire CVD,Silicon nitride
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