A Multichannel Oscillator For A Resonant Chemical Sensor System
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS(2014)
摘要
Vapor detection using highly sensitive miniaturized resonant sensors is of great interest for many applications, including consumer, industrial, and environmental applications. An operational-amplifier-based multichannel oscillator that interfaces with a 50-MHz capacitive micromachined ultrasonic transducer array is presented for chemical sensing applications. The circuit was implemented in a 0.18-mu m CMOS technology to reduce power consumption, number of wires, and active area per channel. The presented integrated circuit also addresses the potential-frequency-locking problem between channels by allowing the open-loop gain to be adjustable off-chip. The feasibility of the developed oscillator for the chemical sensing application is demonstrated. Two channels that were operated simultaneously achieved excellent volume sensitivities of 8.5 x 10(-4)%/Hz and 3.9 x 10(-4)%/Hz, respectively, to relative humidity in N-2.
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关键词
Capacitive micromachined ultrasonic transducer (CMUT), chemical sensor, humidity detection, multichannel oscillators
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