Dry Etching of Pb(Zr,Ti)O3 Capacitor Module with TiN Hard Mask 쟧n O2/Cl2 PlasmaSuk-Kyoung Hong, Young-Jin Son,Yoon-Jung Kim, Yong-Wook Song,Soon-Yong KweonJournal of The Korean Physical Society(2009)引用 2|浏览16暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要