Nano-Electro-Mechanical (NEM) relays and their application to FPGA routing

Chen Chen,W. Scott Lee,J. Provine,Soogine Chong,Roozbeh Parsa,Daesung Lee,Roger T. Howe,H.-S. Philip Wong,Subhasish Mitra

ASP-DAC（2012）

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摘要

Nano-Electro-Mechanical (NEM) relays are nano-scale switches that can be mechanically actuated by an electrical signal. Unlike conventional CMOS transistors, NEM relays exhibit zero off-state leakage and very sharp on-off transitions. As a result, NEM relays can be potentially used to design highly energy-efficient digital systems. NEM relays are also excellent candidates for programmable routing switches in Field Programmable Gate Arrays (FPGAs) due to their potentially low on-state resistances despite their long mechanical delays. Low-temperature fabrication of NEM relays creates opportunities for their integration on top of silicon CMOS circuits. Hysteresis properties of NEM relays can enable their use as FPGA programmable routing switches without requiring additional routing SRAM cells. In this talk, we will present an overview of NEM relays and their use in digital system design, and discuss design considerations for hybrid CMOS-NEM FPGAs.

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关键词

nanoscale switches,nanofabrication,energy-efficient digital systems,network routing,on-state resistances,electrical signal,hybrid cmos-nem fpga,silicon cmos circuits,on-off transitions,nem relays,field programmable gate array routing switches,mechanical delays,off-state leakage,cmos logic circuits,nanoelectromechanical devices,semiconductor switches,cmos transistors,nanoelectromechanical relays,fpga routing switches,field programmable gate arrays,digital system design,routing sram cells,semiconductor relays,low-temperature fabrication,energy efficient,routing,field programmable gate array,cmos integrated circuits

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