Measurement System for Scanning Microscope Using Pulse Laser Light Source

To reduce a measurement time in scanning microscope using pulse laser light source, we developed a novel measurement system. In the system, address data of sample stage signal are detected together with a sign from a sample. Using this system, a fluorescence image of a nano-scale with 250nm L&S line pattern was measured with a positioning accuracy of 40nm. A contrast of the image with 100×100 pixels corresponds to that for the diffraction limit of an objective lens. It takes only 20 sec for obtaining one image with a good S/N. It is expected the system contribute to microscopy applied in a research field concerning nano-science.