Micromachining for improvement of integrated ultrasonic transducer sensitivity
IEEE Transactions on Electron Devices（1990）
关键词
biomedical ultrasonics,machining,sensitivity,ultrasonic materials testing,ultrasonic transducers,integrated ultrasonic transducer sensitivity,medical imaging,micromachined diaphragm structure,nondestructive evaluation,parasitic capacitance,sensitivity,solid substrate transducers
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要