Nanochip: A MEMS-Based Ultra-High Data Density Memory Device
ADVANCED MATERIALS AND TECHNOLOGIES FOR MICRO/NANO-DEVICES, SENSORS AND ACTUATORS(2010)
摘要
The paper provides an overview of a probe storage device development. The main results are related to successful development of ferroelectric memory, MEMS micro-mover with large range of motion and an array of cantilevers with sharp tips (read write heads), demonstrating wear resistance of the tips, integration of memory material into the MEMS process, integration of MEMS cantilever process with CMOS, development of analog front end electronics, including read channel and servo system, and a controller for a storage device.
更多查看译文
关键词
Probe storage,non-volatile memory,ferroelectric memory,scanning probe charge reading,MEMS,CMOS-MEMS integration,micro-mover
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络