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3ω thermal conductivity measurements of thin film dielectrics on silicon for use in cantilever-based IR imaging

C. D. W. Jones,F. Pardo,C.-S. Pai,J. E. Bower,J. F. Miner,F. P. Klemens,R. A. Cirelli,E. J. Ferry,J. A. Taylor,M. R. Baker,B. S. Dennis,W. M. Mansfield,A. Kornblit,R. C. Keller,J. V. Gates,A. P. Ramirez

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B（2009）

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关键词
dielectric thin films,plasma CVD,silicon compounds,thermal conductivity
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