A new three-dimensional 30 GHz bandpass filter using the LIGA micromachined process

In this letter, a new micromachined 3-D bandpass filter in the Ka-band is proposed using the LIGA process. The characteristic impedance and design parameters for the 3-D filter are determined from the experimental results and the filter design rule. The filter shows a wide-bandpass characteristic of 39%, with nil insertion loss of 1.7 dB at 33.2 GHz, and can be applicable in high-power MMICs. (C) 2001 John Wiley & Sons, Inc.