Al2O3–cyanate ester hybrid thick films through aerosol deposition and resin infiltration

Al2O3–cyanate ester hybrid thick films had high Al2O3 contents over 75vol.% were fabricated as 3D integrated substrates. The Al2O3–cyanate ester hybrid thick films were completed by resin infiltration of the cyanate ester into the porous Al2O3 thick films deposited by aerosol deposition (AD). Al2O3 particles were packed as high-density layers in the porous Al2O3 thick films by controlling the carrier gas flow rate using AD at room temperature. As dielectric substrate materials, the Al2O3–cyanate ester hybrid thick films had dielectric constant of 7.6 and quality (Q) factor of 390, and both were nearly independent of the measuring frequency.