Note on Layout-Aware Weighted Probabilistic Bridge Fault Coverage

Masayuki Arai, Yoshihiro Shimizu,Kazuhiko Iwasaki

Test Symposium(2012)

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摘要
Shrinking feature size and higher integration on semiconductor device manufacturing technology bring a problem of the gap between the defect level estimated at the design stage from the reported one for fabricated devices. In this study, as one possible strategy to accurately estimate the defect level, we discuss on fault coverage estimation with more accuracy for the given test pattern set. We consider the probability that intermediate voltage caused by bridge/open defects is translated into logic values 0/1 at any of successive nodes. For each possible pair of signal lines in a given layout data, we execute critical area analysis. On the basis of critical areas obtained, we calculate weighted probabilistic bridge fault coverage, considering frequency of occurrence of each fault.
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关键词
bridge circuits,semiconductor device testing,critical area analysis,defect level,fabricated device,fault coverage estimation,layout aware weighted probabilistic bridge fault coverage,probability,semiconductor device manufacturing technology,shrinking feature size,test pattern set,critical area,layout-aware,weighted fault coverage,weighted probabilistic fault coverage
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