Design and simulation of MEMS-based broadband unidirectional CPW-fed rectangular slot antenna

A broadband unidirectional coplanar waveguide (CPW) fed rectangular slot millimeter wave antenna based on micro-electro-mechanical systems (MEMS) non-silicon micro-fabrication technology is discussed. A wide impedance bandwidth of 75% (S 11 < −10 dB) was obtained. By adding three layers of wave cut-off slots and a guiding slot, the antenna achieves unidirectional radiation, and the max gain of the antenna increases from 3.8 to 6.8 dB. Ansoft HFSS and CST Microwave Studio, two high frequency structure simulation softwares based on finite element method (FEM) and finite integration method (FIM), respectively, are used to simulate and analyze the antenna performances.