ACID: Automatic Sort-Map Classification for Interactive Process Diagnosis

Design & Test of Computers, IEEE(2007)

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摘要
Process diagnosis is critical to the semiconductor industry. Early detection of faulty process steps can dramatically reduce business losses and accelerate the development cycle of new products. This article proposes a novel methodology called AC/ID (automatic classification/interactive diagnosis) that can isolate the root causes of yield loss by combining end-of-line tests (such as wafer sort test) with process history information. The authors have automated the AC/ID methodology in a software tool, ACID (Automatic Classification for Interactive Design), which is fully operational at industrial production sites.
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关键词
circuit testing,electron device manufacture,fault diagnosis,interactive systems,pattern classification,ACID software tool,automatic sort-map classification,end-of-line tests,faulty process detection,interactive process diagnosis,process history information,semiconductor industry,AC/ID methodology,commonality analysis,electrical sort test,fault diagnosis,pattern recognition,semiconductor manufacturing,statistical methods
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