基本信息
浏览量:6

个人简介
Zheng Tao was born in Shanghai, China, in 1977. He received the B.S. degree in chemistry from Fudan University in 1999. From 2000 to 2004, he was an Etch Process Engineer with LAM Research China. From 2004 to 2006, he was a Senior Etch Process Engineer with UMCi, Singapore. From 2006 to 2009, he was a Senior R&D Etch Process Engineer with the Sony Atsugi Tech Center. From 2009 to 2013, he was an Assistant Etch Process Manager with AMEC, China. He has been with imec since 2013, where he has been a Principal Member of Technical Staff since 2018. He is a major in charge of SADP/SAQP FIN patterning and vertical FET pattering scaling.
研究兴趣
论文共 11 篇作者统计合作学者相似作者
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Advanced Etch Technology and Process Integration for Nanopatterning XI (2022)
Zheng Tao,Yisuo Li,Waikin Li,Minsoo Kim,Basoene Briggs,Katia Devriendt,Lieve Teugels,Farid Sebaai,Christophe Lorant,Clement Porret,Erik Rosseel,Alfonso Sepúlveda Márquez,Nicolas Jourdan,Juergen Boemmels,Jerome Mitard,Philippe Matagne,Efrain Altamirano-Sánchez,Lars-Ake Ragnarsson,Anish Dangol,Dmitry Batuk,Gerardo Tadeo Martinez Alanis,Jef Geypen, Kenichi Kanazawa, Testuo Izawa,Masakazu Kakumu,Koji Sakui,Nozomu Harada
Advanced Etch Technology and Process Integration for Nanopatterning XI (2022)
Anshul Gupta,Olalla Varela Pedreira,Goutham Arutchelvan,Houman Zahedmanesh,Katia Devriendt,Hans Mertens,Zheng Tao,Romain Ritzenthaler, Shouhua Wang,Dunja Radisic,Karine Kenis,Lieve Teugels,Farid Sebai,Christophe Lorant,Nicolas Jourdan,Boon Teik Chan,Sujith Subramanian,Filip Schleicher,Toby Hopf,Antony Premkumar Peter,Nouredine Rassoul,Haroen Debruyn, Ingrid Demonie,Yong Kong Siew,Thomas Chiarella,Basoene Briggs,Xiuju Zhou,Erik Rosseel,An De Keersgieter,Elena Capogreco,Eugenio Dentoni Litta,Guillaume Boccardi,Sylvain Baudot,Geert Mannaert, Noemie Bontemps,A. Sepulveda,Sofie Mertens,Min-Soo Kim,Emmanuel Dupuy,Kevin Vandersmissen,Sara Paolillo,Dmitry Yakimets,Bilal Chehab,Paola Favia,Christel Drijbooms, Joris Cousserier,Manoj Jaysankar,Frederic Lazzarino,Pierre Morin,Efrain Altamirano,Jerome Mitard,Christopher J. Wilson,Frank Holsteyns,Juergen Boemmels,Steven Demuynck,Zsolt Tokei,Naoto Horiguchi
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作者统计
#Papers: 11
#Citation: 103
H-Index: 4
G-Index: 10
Sociability: 5
Diversity: 2
Activity: 0
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