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个人简介
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
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MICROMACHINESno. 1 (2024): 95
Sensors (Basel, Switzerland)no. 5 (2023): 2525-2525
SEPARATIONSno. 11 (2023): 555-555
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)pp.43-46, (2022)
Microno. 4 (2022): 589-604
2021 IEEE International Workshop on Metrology for Automotive (MetroAutomotive)pp.237-242, (2021)
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