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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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论文共 8 篇作者统计合作学者相似作者

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Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and its applications in process characterization and control
Yaobin Feng, Pandeng Xuan,Dean Wu, Bruce Yang, Craig Xu, Neo Liu, Pavel Izikson, Huanian You, Xi-Zhi Yan, Vladimir Markov, Yvon Chai,Chaoyu Chen,
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021): 144-149
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An Innovative Graphical Platform for Real Time Accurate AEI Overlay Prediction and Rework Control
Yaobin Feng, JianFeng Li, Alex Wang,Xue Huang,Senmao Zeng,Nick Lu,Dean Wu, Pandeng Xuan, Yang Kuang,Ningqi Zhu, Erik Xiao,Mi Zhang,
2021 China Semiconductor Technology International Conference (CSTIC)pp.1-4, (2021)
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An accurate and robust after-develop overlay measurement solution using YieldStar multi-wavelength optical metrology accompanied by a precise application strategy
Pengzhen Zhang, Kai You, Pandeng Xuan,Yaobin Feng,Longfei Shen,Jolly Xu,Ji-Ling Hou, Saravana Prakash Shanmugasundaram, Summer Sui, Shiwei Ren, Chengkun Li, Jerry Fang,
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021): 712-718
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Model Based Caopc Flow For Memory Chips To Improve Performance And Consistency Of Ret Solutions
Srividya Jayaram, Sherif Hany Mousa,Ashutosh Rathi, Pat Lacour, Zhenguo Zheng, Lei Zhang,Yaobin Feng, Jun Yao
OPTICAL MICROLITHOGRAPHY XXXIII (2021)
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Quantifying global and local CD variation for an advanced 3D NAND layer (Conference Presentation)
Will Conley,Yaobin Feng,Zhiyang Song,Moran Guo, He Jun, Longxia Guo, Gang Xu, Simon Hsieh, James Bonafede,Stephen Hsu,Austin Peng,Junwei Lu,
https://doi.org/10.1117/12.2515725 (2019)
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