Xiaodong LiUniversity of South Carolina Department of Mechanical Engineering Columbia SC 29208 USA关注立即认领分享关注立即认领分享基本信息浏览量:20职业迁徙个人简介暂无内容研究兴趣论文共 3 篇作者统计合作学者相似作者按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选时间引用量主题期刊级别合作者合作机构Effects of annealing in O 2 and N 2 on the microstructure of metal organic chemical vapor deposition Ta 2 O 5 film and the interfacial SiO 2 layerYoung-Bae Park,Xiaodong Li,Gap-Jin Nam,Shi-Woo RheeJournal of Materials Science: Materials in Electronics(1999)引用6浏览0引用60Comparison of Si / Si0₂ Interface Formed by Remote Plasma Enhanced Chemical Vapor Deposition and Thermal OxidationYoung-Bae Park,Xiaodong Li,Shi‐Woo Rhee한국진공학회 학술발표회초록집pp.24-24, (1995)引用23浏览0引用230Effect of SiF₄ addition on the structures of silicon films deposited at low temperature by remote plasma enhanced chemical vapor depositionXiaodong Li,Young-Bae Park, Dong Hwan Kim,Shi‐Woo RheeJournal of the Korean Vacuum Society (1995): 144-144引用23浏览0引用230作者统计合作学者合作机构D-Core合作者学生导师暂无相似学者,你可以通过学者研究领域进行搜索筛选数据免责声明页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn