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个人简介
Tetsuya Goto was born in Chiba, Japan, in 1972. He received the B.S., M.S., and Ph.D. degrees in physics from Tsukuba University, Ibaraki, Japan in 1995, 1997, and 2000, respectively.
He researched physics of high-temperature plasmas at Tsukuba University. In 2000, he moved to Tohoku University, Sendai, Japan, where he is currently an Associate Professor in the New Industry Creation Hatchery Center. He is currently engaged in plasma process technologies such as sputtering film depositions, plasma-enhanced chemical vapor depositions, plasma etchings for semiconductor devices and packages, and flat panel displays using newly developed rotation magnetron sputtering and microwave-excited low-electron temperature plasma.
Dr. Goto is a member of the Japan Institute of Electronics Packaging, Information, and Communication Engineers of Japan, and the Japan Society of Applied Physics.
研究兴趣
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JAPANESE JOURNAL OF APPLIED PHYSICSno. 2 (2024)
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII (2023)
Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials (2023)
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXVI (2021)
semanticscholar(2021)
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Proceedings of the International Display Workshops (2020)
Journal of Vacuum Science & Technology Ano. 1 (2020)
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