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论文共 139 篇作者统计合作学者相似作者

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AI-Powered Etching Architecture Refinement from Small Data in 3D NAND Development
Cheng-En Tsai, Ming-Tsung Wu,Nan-Tzu Lian, Chih-Yuan Lu,Zusing Yang, Kuan-Ting Lu,Tahone Yang, Min-Hsuan Huang, Hong-Ji Lee,Kuang-Chao Chen
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2025)
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Elimination of 3D NAND Through-Array Contact Shortage on Yield Enhancement
Kuan-Ting Lu,Yuan-Chieh Chiu, Cheng-En Tsai, Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen, Chih-Yuan Lu
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-5, (2025)
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Utilizing PFIB for Preparing TEM Lamellae Tailored to High Aspect Ratio 3D NAND Structures
Yu-Chih Chen, Zhao-Ling Wu, Bo-Hao Chiou,Chun-Hung Lin,Hsin-Cheng Hsu,Chin-Chih Yeh,Nan-Tzu Lian,Ta-Hone Yang,Kuang-Chao Chen
International Symposium for Testing and Failure Analysis ISTFA 2024 Conference Proceedings from the 50th International Symposium for Testing and Failure Analysis (2024): 82-86
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A Case of Plasma-Induced Film Breakdown in 3D NAND BEOL Dielectric Etch
Ying-Hung Liang,Yuan-Chieh Chiu,Zusing Yang,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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The Constraint Artificial-Intelligence Assisted Method for Etching Structure Optimization
Zusing Yang, Ying-Hung Liang, Cheng-En Tsai,Ming-Tsung Wu,Yuan-Chieh Chiu,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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Common Source Line-to-Word Line Short Improvement by Eliminating SLT Sidewall Notch in 3D NAND Deep Trench Patterning
Yao-An Chung, Yuan-Chieh Chu, Chih-Chin Chang,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2023)
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Post-Etch Yield Killer Defects in 3D NAND High Aspect Ratio Etching Process
Chih-Chin Chang,Ching-Hung Hsiao, Yi-Che Chen, Ching-Hung Wang,Yao-An Chung, Li-Wei Wang,Hong-Ji Lee,Nan-Tzu Lian,Shih-Chin Lee,Tzung-Ting Han,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2023)
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作者统计

#Papers: 139

#Citation: 1879

H-Index: 23

G-Index: 38

Sociability: 7

Diversity: 2

Activity: 1

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